MEMS+™ for MEMS+IC in Cadence Virtuoso.
Non-MEMS specialists are tasked with designing MEMS devices into new products. They are less concerned with the detailed MEMS device design and more focused on conditioning the sense or drive signal. Their challenge is to design and optimize the custom IC that convert the MEMS device into a commercial product.
In order to succeed, the IC designer requires a fast and accurate model of the MEMS device in their model library. MEMS+ supplies these models in the Cadence Virtuoso library manager as “symbol view”, “Spectre view” and Ultra-Sim view”. MEMS+ also has an option to load the “layout view” as a PCell.
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Description of MEMS+ for Cadence Virtuoso
MEMS+ is a design solution for coupled MEMS+IC design flow. IC and layout designers require a MEMS component in their preferred IC design environment, and MEMS+ provides the tools for creating that component plus the simulation models. For the MEMS specialist, MEMS+ Innovator allows users to assemble a 3-D model using material properties, a process description, and library components. As components are added to a model, they instantly appear on the design canvas, allowing the user to easily identify potential problems with component dimensions. For the IC designer, the final design is exported as a GDS file, a PCell or imported as a Virtuoso library component and used in the Cadence Virtuoso Spectre and UltraSima circuit simulators. Results from those simulations can be opened in the MEMS+ Scene3D module for 3-D viewing.
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Features of MEMS+ for Cadence Virtuoso
- Easy MEMS model entry in 3-D
- Automatic behavioral model creation for Cadence
- Fast circuit simulations
- Accurate MEMS model library (non-linear, multi-physics)
- Automatic PCell generation
- Maintains model parameters
- GUI or Script driven
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