Overview: Our Products for MEMS Development
For nearly two decades, Coventor has collaborated with world-leading MEMS companies and R&D organizations to create MEMS simulation products that accurately predict the complex, multi-physics behavior of these devices. Our on-going focus has resulted in MEMS-specific capabilities and simulation expertise that helps our customers significantly reduce time to market while simultaneously producing robust, high performance designs with very high yield.
Design and Simulation
Coventor offers complementary products for MEMS design: MEMS+® and CoventorWare®. These software tools are ideal for MEMS devices that employ mechanical, electrostatic, piezo-electric, piezo-resistive, or thermal effects for sensing or actuation. Together, MEMS+ and CoventorWare provide a design platform that enables MEMS designers to simulate critical end-product performance specs such as sensitivity, linearity, frequency response, signal-to-noise ratio, temperature stability or actuation time. The figure below shows the uses of each product during phases of a typical MEMS development program.
Customers typically purchase both products due to their complementary nature:
|Rapid design exploration and optimization. Models are assembled from a library of fully parametric, MEMS-specific, high-order finite elements and simulate 2-to-3 orders of magnitude faster than traditional FEA, enabling
|Detailed device analysis with a suite of FEM/BEM solvers. The 2D-to-3D model builder, automatic meshing and field solvers are optimized for MEMS structures and multi-physics, addressing most types of MEMS:
Designing MEMS Structures and Processes for High Yield
Unlike CMOS processes, MEMS processes are highly customized to a particular class of devices making it essential for all stakeholders in a MEMS development project to fully understand and account for processing effects. To reduce prototyping and improve yield, Coventor offers two separate products, CoventorWare Designer™ and SEMulator3D®. Both products generate 3D MEMS models by combining 2D design data (layout) with a process description, however Designer produces idealized structures while SEMulator3D incorporates modeling technology that enables virtual fabrication.
SEMulator3D models include realistic processing effects such as rounding of conformal deposits, undesirable voids, and incomplete release etches. The SEMulator3D platform is used by leading IDMs and independent MEMS foundries to predict, diagnose, and resolve complex processing issues. Most importantly, it is used to verify MEMS designs prior to tape-out. SEMulator3D is now part of the standard verification flow in multiple MEMS fabs and independent foundries.