Overview: Our Products for MEMS Development

For over two decades, Coventor has supplied world-leading MEMS companies and R&D organizations with simulation tools that accurately predict the complex, multi-physics behavior of MEMS devices. Our on-going focus has resulted in MEMS-specific capabilities and simulation expertise that helps our customers significantly reduce time to market.

New, Integrated Design Methodology

Coventor offers integrated products for MEMS design: CoventorMP®MEMS+® and CoventorWare®. These software tools are ideal for MEMS devices that employ mechanical, electrostatic, piezo-electric, piezo-resistive, or thermal effects for sensing or actuation. CoventorMP is a unified design platform for MEMS design, that allows transfer of MEMS device models between the MEMS+ and CoventorWare design software products. MEMS+ and CoventorWare work seamlessly together in the CoventorMP framework. They provide a design platform that enables MEMS designers to simulate critical end-product performance specs such as sensitivity, linearity, frequency response, signal-to-noise ratio, temperature stability or actuation time. Both products are useful in all phases of a typical MEMS development program.

CoventorMP Platform

CoventorMP, MEMS+ and CoventorWare add value in all phases of a MEMS development program

The CoventorMP platform contains both the MEMS+ and CoventorWare software products. Many customers purchase CoventorMP to take advantage of the complementary strengths of MEMS+ and CoventorWare.

CoventorMP Software Features

CoventorMP combines the complementary strengths of Coventor’s industry-leading software tools for MEMS design, CoventorWare® and MEMS+®, into a single powerful environment for MEMS design automation. The new platform provides a cohesive environment where designs can be entered once and used to create conventional finite element models (CoventorWare) and compact finite element models (MEMS+).

The CoventorMP platform provides a unified environment for MEMS design, starting from fully parametric design entry to the production of functional models that can be simulated at all levels of abstraction. In essence, design data in CoventorMP will serve as a single “golden master” for all types of modeling, eliminating the need for time consuming and error-prone manual transfer between different modeling environments.  MEMS device models created in CoventorMP can be simulated with built-in solvers or automatically transferred into MATLAB®, the Simulink® system modeling environment, the Cadence Virtuoso® circuit modeling environment, and SPICE simulators that support Verilog-A.

MEMS+ CoventorWare
Rapid design exploration and optimization. Models are assembled from a library of parametric, high-order finite elements and can simulate up to 100X faster than conventional FEA, enabling

  • Modal analysis
  • Quasi-static coupled electro-mechanics (pull-in, lift-off, electrostatic spring softening)
  • Harmonic analysis
  • Sensitivity studies of design and fabrication variables
  • Transient simulations of electro-mechanical behavior fully coupled with gas damping effects
  • Closed-loop system simulation in Simulink and Cadence
  • Noise analysis in Cadence Spectre and APS simulators
  • Inclusion of package/substrate deformation effects on sensor performance

 

Detailed device analysis with a suite of FEM/BEM solvers. The 2D-to-3D model builder, automatic meshing and field solvers are optimized for MEMS structures and multi-physics, addressing most types of MEMS:

  • Modal analysis
  • Quasi-static coupled electro-mechanics (pull-in, lift-off, electrostatic spring softening)
  • Harmonic analysis
  • Fast-frequency-sweep algorithm for piezoelectric BAW resonators
  • Gas damping for any 3D geometry
  • Energy dissipation from thermo-elastic damping and anchor losses
  • Sensitivity analysis of piezo-resistive sensors
  • Detailed stress analysis

MEMS Process Development

Unlike CMOS fabrication processes, MEMS fabrications processes are highly customized to a particular class of devices making it essential for all stakeholders in a MEMS development project to fully understand and account for processing effects. To reduce prototyping and improve yield, Coventor’s SEMulator3D® software makes it easy to build 3D structural models from 2D design data (layout). SEMulator3D creates 3D models that include realistic processing effects such as rounding of conformal deposits, undesirable voids, and incomplete release etches. SEMulator3D models are used to predict, diagnose, and resolve complex processing issues. Most importantly, SEMulator3D models are used to verify MEMS designs prior to tape-out. SEMulator3D is now part of the standard verification flow at well established MEMS fabs and independent foundries.

3D models of a rotating projection mirror built with CoventorMP (left), and SEMulator3D (right), with hinge detail highlighted. The CoventorMP model is ideal for both reduced-order modeling and finite-element modeling while the SEMulator3D model includes more realistic structural details.

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