MEMS designers have long taken two approaches to simulating the physical behavior of their designs: 1) highly simplified “lumped mass” models implemented in SPICE, or 2) very accurate, but time-consuming, finite element analysis (FEA). Architect3D™ provides the best of both worlds: the accuracy of FEA with the speed of SPICE. Architect3D is ideal for designing and optimizing MEMS devices such as accelerometers, gyroscopes, resonators, switches, and optical mirrors that depend on electrostatics for actuation or sensing. Architect3D goes way beyond the limitations of simple SPICE-based models and macro-models derived from FEA. Simulations run in seconds or minutes rather than hours or days, while capturing complex effects like cross coupling between mechanical degrees of freedom, substrate deformation, electrostatic spring softening, and quadrature effects in gyros.

With Architect3D, you can…

  • Fully capture complex, real-world MEMS designs,
  • Rapidly evalute design concepts versus performance specification
    such as sensitivity, linearity, bandwidth and response time,
  • Optimize designs for performance, temperature sensitivity, manufacturability, and yield,
  • Perform transient simulations that are impractical with FEA
  • View 3D animations of mode shapes, harmonic response and transient behavior
  • Simulate temperature stability of accelerometers and gyroscopes,
  • And much more…

Modal analysis (first mode) of an RF resonator

3D animation of a transient simulation of an electro-statically actuated plate with asymmetric suspension

Transient simulation of a DLP Mirror switch cycle

First mode shape obtained from an electro-mechanical analysis of a gyroscope

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