Many commercially successful MEMS devices rely on other physics besides capacitive effects for sensing and actuation. Piezo-electric effects are exploited in energy harvesting devices and high-frequency resonators. And piezo-resistive effects are commonly used in absolute pressure sensors as well as specialty accelerometers. There are also MEMS actuators that rely on electro-thermo-mechanical effects (Joule heating) as the main motive force. The field solvers in CoventorWare can accurately and efficiently simulate all of these effects in real-world designs.