MEMS Simulation - Multiphysics Device Simulation
CoventorWare ANALYZER™ is more than a general-purpose Finite Element Analysis (FEA) package. It is loaded with MEMS-specific features that will save you time and help you get accurate answers to design questions without having to become a simulation expert. Here are a few examples of MEMS design simulations that are easy to investigate with ANALYZER’s MEMS solvers:
- Capacitance of multi-conductor devices
- Electrostatic actuation force, fully accounting for fringing fields
- Pull-in and lift-off voltage of electrostatically actuated devices
- Electrostatic “spring-softening” effects
- Gas damping including rarefaction effects
- Harmonic analysis of piezo-electrically actuated resonators
- Package deformation effects (due to ambient temperature or other external forces) on device performance
- Pre- and post-buckling analysis
- Optimal configuration of piezo-resistive (PZR) sensor elements
- Electro-thermal actuation
For more than 14 years, CoventorWare ANALYZER has been meeting the simulation needs of leading MEMS companies and research organizations. ANALYZER provides comprehensive coverage of MEMS coupled physics, including:
Structural Mechanics
- Linear or non-linear
- Contact
- Steady-state or Transient
- Modal analysis
- Harmonic analysis
- Thermo-mechanical
- Thermo-mechanical including Joule heating
- Piezoelectric effects
- Piezoresistive effects
Electrostatics/Electromagnetics
- Capacitance
- Electrostatic force
- Charge density
- Include dielectric materials
- Electro-quasistatics (lossy dielectrics)
- Resistance and inductance
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Coupled Fields
- Electrostatic/Structural
- Automatic pull-in voltage
- Automatic lift-off voltage
- Include contact
- Include electrostatic spring softening
- Include non-linear spring hardening
- Thermal/Structural
- Piezoelectric/Thermal/Structural
- Piezoresistive/Thermal/Structural
Gas Damping
- Squeezed-film
- Low Reynolds number general geometry (Stokes flow)
- Include rarefaction effects (slip boundary condition)
- Reduced order model extraction (compatible with Architect)
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Learn about applying CoventorWare in our MEMS Application Gallery
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| MEMS Gyroscope |
MEMS Accelerometer |
MEMS RF switch |
MEMS DLP Mirror |
MEMS FBAR |
MEMS Resonator |
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