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Verify your MEMS design by performing 3D numerical simulations using best-in-class field solvers that have been optimized for MEMS applications

CoventorWare ANALYZER™ provides a single unified interface to a complete suite of 3D field solvers.  No matter what type of MEMS or microfluidics device, or the physics involved, you’ll find what you need in ANALYZER.  From coupled electromechanics to piezoresistance to microfluidic effects such as dielectrophoresis, it’s all there.  And, because Coventor has built in years of experience in addressing MEMS and microfluidics applications, our customers tell us that they’re able to go up the learning curve much faster than with competing general purpose FEA tools.   A host of special features for simulating MEMS and microfluidics devices ensures that you’ll spend time improving your design instead of learning how to simulate it.

With ANALYZER, you can:

  • simulate the physical behavior of your MEMS or microfluidics design using the most appropriate, best-of-breed 3D field solvers
  • perform multi-physics simulations that are critical to MEMS, such as coupled electro-mechanics and fluid-structure interaction
  • explore a variety of design concepts to find out which ones work
  • perform parametric studies to optimize your design
  • investigate manufacturing effects such as residual stress
  • understand the impact of changes in the fab process and material properties
  • incorporate packaging effects such as the effects of ambient temperature and pressure
  • predict or validate experimental measurements
  • validate simulation results from other tools

ANALYZER works hand-in-hand with CoventorWare DESIGNER™ to provide a manufacturing-aware design flow.  A sophisticated Preprocessor serves as the bridge between the tools –  users can view 3D models created in DESIGNER and then easily prepare them for simulation using automated meshing capabilities that have been optimized for MEMS and microfluidics geometries.  The postprocessing Visualizer for 2D and 3D graphical output is shared by all solvers – learn to use it for one and you’ve learned for all.

The field solvers are developed by Coventor or sourced from industry leaders, ensuring that you’re using the most appropriate and up-to-date technology available.  Rather than relying on a single numerical method, such as finite elements (FEM), each ANALYZER solver uses the numerical method best suited to the physics it addresses.  The numerical methods underlying ANALYZER’s solvers include:

  • Finite Element Method (FEM), optimal for structural mechanics
  • Boundary Element Method (BEM), optimal for electrostatics and gas damping
  • Finite Volume Method (FVM), optimal for single-phase microfluidics
  • Volume of Fluid (VOF) method, optimal for multi-phase microfluidics
ANALYZER’s solvers are flexibly bundled –  you can purchase the full suite or just the subset of solvers that’s relevant to your application.

Users may customize ANALYZER by choosing specific field solvers for their applications.
Our best-of-class solvers include:

  • Finite element methods (FEM) - for mechanics and general fluidics
  • Boundary element methods (BEM) - for electrostatics
  • Volume of Fluid method (VOF) - for multi-phase fluidics (solid + liquid + gas)
  • 3D Preprocessor - All ANALYZER bundles include MEMS-specific mesh generation.
  • Simulation Manager - for setting up field solvers, managing boundary conditions, initiating solution sequences, capturing and storing design data
  • Visualization Post Processor - for analyzing solver results and creating 2D and 3D graphical output





Close up of a 3D Ring Gyro model in DESIGNER; ready for simulation in ANALYZER


Ring Gyro Simulation in ANALYZER


Nonlinear mechanical deformation result on an 8-layer MEMS beam showing stress contours



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