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Select a best-of-breed field solver from the most comprehensive suite available to perform complex, fully-coupled, multi-domain physics simulations.

CoventorWare ANALYZER™ is more than a general-purpose Finite Element Analysis (FEA) package. It is loaded with MEMS-specific features that that will save you time and help you get accurate answers to design questions without having to become a simulation expert or master an arcane scripting language.  Here are a few examples of MEMS design properties that are easy to investigate with ANALYZER’s MEMS solvers:

  • Capacitance of multi-conductor devices
  • Electrostatic actuation force, fully accounting for fringing fields
  • Pull-in and lift-off voltage of electrostatically actuated devices
  • Electrostatic “spring-softening” effects
  • Gas damping including rarefaction effects
  • Harmonic analysis of piezo-electrically actuated resonators
  • Package deformation effects (due to ambient temperature or other external forces) on device performance
  • Pre- and post-buckling analysis
  • Optimal configuration of piezo-resistive (PZR) sensor elements
  • Electro-thermal actuation

For more than 10 years, CoventorWare ANALYZER has been meeting the simulation needs of leading MEMS companies and research organizations. ANALYZER provides comprehensive coverage of MEMS physics, including:

Structural Mechanics

  • Linear or non-linear
  • Contact
  • Steady-state or Transient
  • Modal analysis
  • Harmonic  analysis
  • Thermo-mechanical
  • Thermo-mechanical including Joule heating
  • Piezoelectric effects
  • Piezoresistive effects

Electrostatics/Electromagnetics

  • Capacitance
  • Electrostatic force
  • Charge density
  • Include dielectric materials
  • Electro-quasistatics (lossy dielectrics)
  • Resistance and inductance

Gas Damping

  • Squeezed-film
  • Low Reynolds number general geometry (Stokes flow)
  • Include rarefaction effects
    (slip boundary condition)
  • Reduced order model extraction (compatible with Architect)

Coupled Fields

  • Electrostatic/Structural
    • Automatic pull-in voltage
    • Automatic lift-off voltage
    • Include contact
    • Include electrostatic spring softening
  • Thermal/Structural
  • Piezoelectric/Thermal/Structural
  • Piezoresistive/Thermal/Structural

 









Vibration mode of a gyroscope



Charge being applied to gyroscope



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