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CoventorWare™ system-level device design will save you months in design time and yield the most thoroughly analyzed design possible for your application
Coventor serves the world's largest MEMS device manufacturers and innovators with an integrated suite of MEMS design tools designed to provide first-pass manufacturability success in a wide variety of applications. In addition, Coventor supplies many point-tools for solving specific MEMS related physics such as Electro-Mechanics and Damping.
 3D geometrical model of gyroscope
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Inertial Sensors
MEMS inertial sensors, including accelerometers and gyroscopes, are now widely used in automotive applications, and rapidly expanding into consumer electronics such as mobile phones and gaming systems. Of course there are other important applications as well, in the aerospace, military and industrial markets… |
SEM picture of gyroscope
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Gyroscopes
This section shows some examples of Gyroscope models inside the CoventorWare-ARCHITECT system level simulator. Many of the MEMS gyroscopes have complex mechanical designs and in addition they require solutions to the 3-D electro-mechanical physics… |
Cross-section of KOH etched silicon diaphragm with buried piezoresistor and simulated stress and current density
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Pressure Sensors
Pressure sensing in automotive engines was the first commercially successful application of MEMS. Today pressure sensors for a wide variety of applications and industries continue to be a substantial portion of the overall MEMS market, with continued growth expected due to the mandating of automatic tire pressure sensing systems in the U.S. and other countries… |
3D model of ohmic RF Switch |
RF MEMS
The term “RF MEMS” encompasses several distinct types of devices, including RF switches and relays, resonators, varactors (variable capacitors) and inductors. RF MEMS are used in all types of wireless communications, radar, satellites, military radio, instrumentation and test equipment. Compared to conventional RF components, RF MEMS offer significant benefits, including lower power consumption, lower insertion loss, lower cost and smaller form factor. The RF MEMS market is beginning to grow rapidly…
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3D model of micromirro |
Optical MEMS
Optical MEMS are used in digital projectors, digital imaging, sensing and communications. Our customers, including the leading manufacturers of optical MEMS, use CoventorWare to design micro-optical devices for a wide variety of applications, including:
- Digital projectors
- Passive and active digital displays
- Image sensors
- Scanning mirrors for point-of-sale terminals
- Tunable lasers for optical communications
- Optical switches and cross connects for optical networks
- Variable optical attenuators (VOAs)
- Programmable add/drop multiplexers
- Wavelength division multiplexer
- Dispersion compensators
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The Broad Role of System-level Modeling in RF-MEMS
By: Mattan Kamon
 Download PDF (8.7MB) |
MEMS-based storage systems
By: Shantanu Kedar
Download PDF (1.8MB) |
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