Mathematical modeling, based on analytically derived formulas, has always been a part of MEMS design.  Over the years, mathematicians and engineers have built up a vast framework for engineering mathematics and applying it to MEMS design.  The ARCHITECT component libraries embody many years of development effort and Coventor’s experience in working closely with leading MEMS companies to apply ARCHITECT to complex MEMS designs.  ARCHITECT enables them to model designs that are so complex, that conventional finite element modeling is not feasible.  Don’t spend valuable engineering time re-creating these powerful building blocks, use ARCHITECT to by-pass this effort and bring better MEMS parts to market faster.  With these component libraries, you can immediately focus on modeling your complete, real-world MEMS part, and its interaction with surrounding electronics, instead of re-inventing the building blocks.

The diagram above shows the levels of modeling supported by ARCHITECT, and how they apply to MEMS design.   The first two levels, the Atomic and Functional Levels, are the building blocks provided by the ARCHITECT component libraries.   The libraries include mechanical, electrical, magnetic, RF, and optical building blocks that can be snapped together to create complex, real-world designs – that’s where the user’s creativity enters.  The mechanical and electrical components, in particular, are based on sophisticated, full parameterized mathematical models.   The connection points on all mechanical models have 6 degrees of freedom (3 translational and 3 rotational).  A beam, for example, has  a connection points at both ends, each with 6 degrees of freedom.  Some of the mechanical components are, in fact, very sophisticated finite elements.  All of the mechanical and electrical components have associated 2-D layout generators.  With a click of a button, ARCHITECT can generate a 2-D layout and a 3-D solid model of your MEMS part.  Not only can the MEMS Part be modeled by snapping together these components, but the entire system, including surrounding control and sensing electronics, can be modeled by using the included library of standard electronic templates and BSIM3 transistor models.

If you are programming your MEMS devices in Matlab-Simulink, ARCHITECT’S library already has the 3D models.  Architect incorporates an HDL simulation engine with  the most extensive set of 3D MEMS model libraries including:

• Electromechanical
• Magnetics
• RF Transmission Lines
• Optical
• Fluidic
• Generic electrical
• Extracted custom models