The easiest, most natural way to describe the third dimension of your MEMS design
The Process Editor provides an intuitive, natural way to describe the third dimension of MEMS designs. With the Process Editor, the user creates a sequence of modeling steps that resemble the actual MEMS fabrication process. DESIGNER then combines the process sequence with 2D layout data to build a 3D solid model that can be used to verify the design, or as the starting point for finite-element analysis in ANALYZER or a 3rd-party field solver. The Process Editor comes with an extensive, customizable library of typical MEMS process steps and complete fabrication sequences. Assembling a process sequence by choosing steps or sequences from the library saves time and assures a consistent level of documentation. Sharing process sequences created in the Process Editor can improve communication within a design team, and with manufacturing partners.
Process Editor Features
3D Modeling Actions library
- Material deposits (planar, conformal, straight, angled)
- Etch operations (generic etch step, frontside or backside)
- Wafer bonding
- Corner rounding
Customizable Process Step Library
- Anisotropic wet etch
- Isotropic etch
- Deep Reactive Ion Etch (DRIE)
- Release dry or wet etch
- Stripping
- Thermal Oxidation
- PECVD
- Sputtering
- Evaporation
- LPCVD
- Spin Casting
- SOI
- Ion-Implant
- Electroplating
- LIGA
- Lift-Off
- Bonding (anodic, fusion)
- Other MEMS process steps
- Other CMOS process steps
Foundry Processes
Other
- Automatically imports layer names from 2D layout files
- Optional password protection to control access access to process data
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