MEMS Reduced-Order Model Extraction
Manage simulations in ANALYZER and extract
reduced-order behavioral models for use in ARCHITECT
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Some physical effects, like gas damping and the mechanical behavior of complex geometric shapes,
must be simulated in ANALYZER to obtain accurate results. INTEGRATOR manages simulations of these
effects in ANALYZER, and extracts custom, reduced-order models for use in ARCHITECT. INTEGRATOR
is the best way to add gas damping effects to an ARCHITECT model. INTEGRATOR also allows users
to supplement
ARCHITECT’s
extensive library of parameterized MEMS components. If a portion of a MEMS structure has a complex
geometric shape that cannot be de-composed into simpler shapes that are available in ARCHITECT’s library,
INTEGRATOR can be used to extract a reduced-order, model of its mechanical stiffness. The resulting
6-degree-of-freedom extracted model is fully compatible with all ARCHITECT components and can be inserted
in an ARCHITECT schematic.
With Integrator, users can extract the following kinds of models for use in ARCHITECT:
GAS DAMPING
- Squeeze- and slide-film damping due to gas trapped in small gaps that are typical
in accelerometers and gyroscopes; based on solving the Reynolds equations
- Free-space gas flow around parts such as torsional mirrors; based on solving the
Stokes equations
SPRING STIFFNESS
- Mechanical stiffness of structural components such as tethers that can be modeled as linear or non-linear mechanical springs
- Electrostatic forces between electrodes or combs that can be modeled as electrostatic springs
INERTIAL COEFFICIENTS
- Inertia of inflexible components, such as the proof mass in an accelerometer or gyroscope, that can be modeled as rigid bodies
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