The following university research papers focus on MEMS technology.  Linked papers are PDF documents, and must be viewed using the free Adobe Acrobat Reader.

Development and Verification of a Standard Packaging Library for Advanced MEMS Design Schröpfer G. (1), Lorenz G. (1), Yano K. (2), Maekoba H. (2), da Silva M. G. (2), Mizukami Y. (3),Yoshida K. (4), Ishii I (4)(IKT)

ABSTRACT:
A Standard Package Library (SPL) for MEMS was developed that facilitates the selection process by providing ready-made package models, which can in turn be used to analyze the effects of the packages on MEMS devices. With access to package geometry and materials data, designers can choose specific package concepts from a variety of package types, initiate performance-based design (such as thermo-mechanical effects), and modify package data to specific microsystem requirements. The use of the package library helps shorten the design cycle, reduce risk and decrease time-to-market. Emphasis is put on coupled device/package macro model extraction, which provides the ability to include package stress effects at the system level.

T-CAD Environment for Multi-Material-MEMS Design U. Triltsch*, S. Büttgenbach*, D. Straube** and H.-J. Franke**. *Technical University of Braunschweig, Institute for Microtechnology (IMT) and **Technical University of Braunschweig, Institute for Engineering Design (IKT)

ABSTRACT:
In this paper we present a design methodology for multi-material MEMS. The designer is interactively lead through the design process from the formulation of basic specifications to prototypes. Different knowledge bases are attached to enable the designer to choose the right solutions for a certain design idea. One core functionality is a built-in catalogue of building blocks which represent sub-functional elements of MEMS, the data model for this function is described. Each building block contains a parameterized geometrical model as well as alternative process flows which can be used to fabricate the components. After setting up a system all process flows from single building blocks are merged by an interactive algorithm, which is described in this paper. An example will be used to illustrate the methodology.

Issues in Design of Torsional MEMS Varactor, C.Venkatesh and Navakanta Bhat. Department of Electrical Communication Engineering, Indian Institute of Science, Bangalore, India. Proceedings of ISSS 2005 International Conference on Smart Materials Structures and Systems July 28-30, 2005, Bangalore, India.

ABSTRACT:
Three and four terminal variants of torsional varactors are introduced. Fabrication results of three-terminal varactor are presented. Issues involved in design of torsional varactor are discussed. Bending of torsion beam and trapped charge in dielectric are analyzed. A systematic design procedure for selecting the dimensions of torsion varactor is presented.

Mems Based Humidity Sensor, K.Govardhan and Z.C.Alex. Department of Electronics and Instrumentation, Vellore Institute of Technology, Vellore, INDIA.. Proceedings of ISSS 2005 International Conference on Smart Materials Structures and Systems July 28-30, 2005, Bangalore, India. .

ABSTRACT:
Humidity plays a very major role in various industries. Monitoring and controlling the humidity is of great importance for the reliable operation of various systems. Micro Electro Mechanical Systems {MEMS} owing to their high reliability and good scaling factors have replaced many conventional sensor systems. Micro Cantilever systems have been found to be highly suited for sensing purposes. A Micro Cantilever Humidity Sensor based on Capacitive principle is designed and various analyses were performed on the sensor. The polyimide being the sensing layer is coated on the Cantilever beam. The beam is provided with movable electrode. As humidity increases, the polyimide absorbs water vapour and causes increase in mass of the beam. The deflection of beam causes capacitance change, which is related to the change in humidity. The design also incorporates a Platinum based temperature sensor to measure the temperature and also a Platinum based heater to regenerate the sensing layer for obtaining next measurement. The structure was designed using Coventorware and Intellisuite. Many analyses were done and the structure was simulated for real environmental conditions, like pressure etc. The results were very close in both these design packages. The structure showed a good linearity and good sensitivity in the regions from 10 - 40 % RH in all temperatures in human adaptive ranges. The beam had an appreciable deflection causing a notable change in capacitance. The sensitivity was in order of Pico to Femto farads per %RH change.

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an "Atom Chip", H.A. Rouabah, C.O. Gollasch and M. Kraft. University of Southampton, School of Electronics and Computer Science, Highfield, Southampton, SO17 1BJ, UK.. Proceedings of 2005 NSTI Nanotechnology Conference & Trade Show, California, USA.

ABSTRACT:
A new spring shape is designed for a MEMS three dimensional electrostatic actuator. A low spring constant in Z direction for a thick structural layer is achieved. Characteristic features and challenges of this design are described and the analytical analysis is verified by FEM simulations using CoventorWareTM. The analytical models are derived for two types of serpentine springs namely a square serpentine spring (SSS) and curved serpentine spring (CSS). The analytical results are in very good agreement with the simulations.

MEMS Manufacturing Technology for Actuated Cantilever and Pressure Sensor, Greg Thompson. TVI Community College, Alburquerque, NM. MEMS Scholarship 2004 Winner.

Integrated Microfluidics Chip for Proteomics, Zhen Wang. University of Alberta, Edmonton, Canada. MEMS Scholarship 2004 Winner.

ABSTRACT:
The rapid expansion of proteomics demands far more rapid, sophisticated and automated analysis of proteins. Microfluidics is being evaluated as a potentially useful method. We have proved that we can integrate protein separation, fractionation, digestion and peptides concentration on the same microfluidic chip, due to the miniaturization of chips. The separated peptides are then detected by Mass Spectrometer allowing the protein to be identified.

Photonic Band Gap/MEMS Actuation, Ariel Lipson. Imperial College, London, UK. MEMS Scholarship 2004 Winner.

ABSTRACT:
Project Summary Photonic band gap (PBG) crystals are nano-sized repetitive structures that enable us to manipulate and control light. Careful engineering of device material and dimensions will alter the reflection properties and hence control the transmitted wavelengths and direction of light propagation. Our project focuses on vertically etched PBG structures into a silicon substrate while using MEMS actuation to alter the physical dimensions of the devices. Such devices can be used as components in an optical communication network or in chemical and biological sensors.

eMosquito(TM): An Actuated Microneedle for Automated Blood Sampling, Giorgio Gattiker. University of Calgary MEMS Scholarship 2004 Winner.

RF/Optical MEMS Integration, Preeti Sharma. Indian Institute of Technology, Delhi India.

ABSTRACT:
My research is focussed in the field of design, fabrication and packaging of RF MEMS Devices and optical integration of conventional MEMS devices at system-level architecture. Devices include Ka-band micromachined transmission lines, antennas, filters, resonators and switches. The device-developing strategy rest on analysis such as electrostatic, mechanical, sensitivity and electromagnetic. I am already using finite element method (FEM) based ANSOFT HFSS 9.0 and ANSOFT Designer for electromagnetic analysis. This third-party tool together with CoventorWare 2004 (based on tetrahedral finite-element meshing) will be a complete workstation for me. My strategy is to apply certain perturbing methods for boundary conditions, and manual meshing techniques such that the results from a software suite can be made to match the measured results with extreme accuracy. As an example of this, I have published a paper (INCURSI 2003) on design of a CPW fed slot-antenna at 17GHz (one in which accurate response depends on accurate assignment of boundary conditions and applying meshing intelligently). I intend to explore the CoventorWare 2004 tool for carrying out detailed study of micromachined structures mentioned in the full