by Stephen Breit, V.P. Engineering, Coventor, Inc.
MEMS integration means different things to different audiences. To pioneers in the MEMS industry, integration may imply a monolithic fabrication process, in which the MEMS and accompanying CMOS electronics are fabricated on the same die. As suppliers of MEMS design automation software to the MEMS industry, Coventor sees integration more broadly as the work of combining MEMS with CMOS electronics, whether in a monolithic process, as separate die in the same package, or even in separate packages. And integration encompasses packaging effects on the MEMS as well. The electronics are analog/mixed-signal (A/MS) circuits that provide electrical input to the MEMS and perform A/D conversion on its output. Such circuits are designed and simulated at a high level of abstraction with MATLAB and Simulink, and at lower levels of abstraction with EDA software such as the Cadence Virtuoso suite. MEMS designers, therefore, must deliver models of their designs that are compatible with the tools of choice for electronics design. Coventor has been focusing on addressing this integration challenge for a number of years.





Steve Breit 