by Bryon Moyer
October 22, 2015 at 1:43 PM
Coventor recently announced the latest release of MEMS+, their MEMS EDA/CAD tool, and the timing was tough because it came just after I had an article involving process design kits (PDKs). And amongst the things that the latest MEMS+ release brings is movement towards MEMS PDKs (MPDKs).
MEMS devices are, of course, notorious for evading any attempts to rope in process and design options through standardization of any kind. Efforts continue, but it remains a challenge.
This means that any MEMS design involves a collaboration between a particular fab (captive or foundry) and the design folks to come up with a physical design that meets the requirements for a particular new sensor or actuator. And what’s done for some new design may have nothing to do with what has been done in the past. Materials may change, dimensions and shapes may change, and circuits and packages may change. Everything’s negotiable.