Inside Lithography And Masks

By Mark LaPedus

Semiconductor Engineering sat down to discuss lithography and photomask technologies with Gregory McIntyre, director of the Advanced Patterning Department at Imec; Harry Levinson, senior fellow and senior director of technology research at GlobalFoundries; David Fried, chief technology officer at Coventor; Naoya Hayashi, research fellow at Dai Nippon Printing (DNP); and Aki Fujimura, chief executive of D2S. What follows are excerpts of that conversation.

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