What Happened To Inverse Lithography?

By Mark Lapedus

Nearly 10 years ago, the industry rolled out a potentially disruptive technique called inverse lithography technology (ILT). But ILT was ahead of its time, causing the industry to push out the technology and relegate it to niche-oriented applications.

Today, though, ILT is getting new attention as the semiconductor industry pushes toward 7nm, and perhaps beyond. ILT is not a next-generation lithography (NGL) tool technology. Instead it falls into the field of computational lithography and is used for the production of advanced photomasks.

read the full article here.

This entry was posted in Press Coverage. Bookmark the permalink.

Comments are closed.