MEMS Process Development with SEMulator3D
The rapid evolution of MEMS applications places significant constraints on MEMS technology development. There is tremendous pressure to accelerate process development to keep pace with current demand while also innovating for the next generation. The ability to model new process flows, verify designs, and document process decisions with SEMulator3D offers a compelling advantage for process engineers facing these challenges.
Process engineers often know what to expect from a single deposit or etch step and can predict its effect on device geometry. But when known steps are combined into novel sequences, the final geometry can be hard to predict. With SEMulator3D, engineers can emulate new process sequences step-by-step and capture critical information about interactions between steps without running costly test wafer runs.
- Teledyne DALSA
SEMulator3D can also be used to generate process documentation once a process is complete and ramp-up to production begins. If production goals require moving fabrication to a new facility or OEM fab, SEMulator3D is a great tool for communicating requirements and expected results.
For examples of MEMs devices modeled with SEMulator3D, please visit our Solutions Gallery.