Process Documentation with SEMulator3D

Documenting processes with cross sections that are hand drawn in PowerPoint or with other drawing tools is difficult and labor-intensive to maintain, especially when process changes require them to be completely re-drawn. These figures are usually not to scale and use static two-dimensional images that do not convey information about the 3D nature of the device and process.

Hand-drawn cross section of memory device, and a SEMulator3D model of the same device.

SEMulator3D uses smart automation techniques that enable faster, more efficient creation of process documentation. Because SEMulator3D understands the process sequence, changing a deposit thickness or etch depth takes just a few mouse clicks. Figures are easily created for each step in the process and updated to reflect changes in minutes rather than hours. Cross sections can be shown at any location in the 3D model to create dimensionally accurate images.

A 45 nm CMOS logic transistor; SEM image

SEMulator3D generates reusable 3D content that can be exported to the SEMulator3D Reader for publishing interactive 3D models or embedded directly into Adobe PDF files in the OBJ format.

Technology Transfer with SEMulator3D

Communication of accurate and complete process information is key to success in semiconductor and MEMS technology transfer. SEMulator3D provides silicon-accurate models that show more information than SEM images. Since the full process is captured in SEMulator3D, engineers can effectively communicate information about the final device or process as well as the sequence of steps required to produce the desired results. Detailed comments or references to other documents can be embedded in the process description, enabling engineers to annotate figures with crucial process information and to pass this information on through the SEMulator3D Reader.

For examples of semiconductors modeled with SEMulator3D, please visit our Solutions Gallery.