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Evaluating MEMS Devices Virtual Metrology & DRIE

This paper further explores the capabilities of Coventor’s powerful SEMulator3D 2013 semiconductor process modeling platform. In this detailed report, the value of these capabilities for evaluating MEMS Devices Virtual Metrology and DRIE is demonstrated. An RF Tunable capacitor, similar to a gyroscope with rotative displacements obtained by comb-drive electrostatic actuation, is used to demonstrate virtual fabrication using Coventor’s SEMulator3D 2014 software platform. The software is used to evaluate the virtual metrology extraction. The Tunable capacitor modeling illustrates the software platform’s capabilities for predictive design technology modeling and virtual measurement data extraction.

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