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Do you understand the data from your process supplier? Can you work with it?
If not, you can with SEMulator3D.
SEMulator3D, a common platform for a broad range of semiconductor applications, provides a complete Parameterized Process Library of process steps with a user-friendly interface. The Process Editor function allows the user to define layer thickness, process steps and descriptions. The 3D visualizer enables users to view, manipulate and cross-section 3D models. SEMulator3D software creates 3D interactive models from GDSII input files or Knights databases.
SEMulator3D software supports the following areas of semiconductor manufacturing:
FAB
• Process documentation, training
• Yield improvement
• Process integration
LAB
• Failure Analysis
• CAD/NAV link/Knights integration
• Circuit editing (front/back)
Design
• Design reviews
• Cadence Virtuoso link
• DFM and DFY platform
SEMulator3D software is used:
• to build 3D models
• to interact with 3D visualization
• to view and save any 2D cross section
• to capture 3D images and videos
• to animate the fabrication steps and Flythrough videos
• to view complex structures in 3D at unique perspectives
• to explore process variations with metrology-capable models
• to communicate for documentation and training
• to customize and build libraries for new processes and nodes
• to visualize region of interest during FA process
• to visualize region of interest during TEM preparation
• to visualize area during deprocessing
Fully customizable for semiconductor processes, users can view complex 3D data structures with complete 3D viewing features in order to:
• view electrical connectivity and identify electrical shorts and opens
• view mechanical connectivity
• find design errors caused by merged parts, improper connections and stringers
• take precise measurements with integrated metrology tool
• toggle visibility of layers on and off for desired level of detail
• perform dynamic/interactive cross sectioning
• simulate FIB/SEM Slice and View or real time Image-while-mill
• view virtual circuit edits for experiment planning, documentation and execution
• view materials in processed order or alphabetically
• access a volume material data query tool
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| Model shown in SEMulator3D-Viewer |
| Example on the parameterization of each individual process step |
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