Process data supplies the 3rd dimension. SEMulator3D comes with several software tools to create or access process information
SEMulator3D utilizes process data to build 3D models. Data of semiconductor CMOS processes comes in many forms, some of which is often only accessible by authorized employees. Even in situations where limited information is available, SEMulator3D can still build usable 3D models.
Highly detailed process documentation
Expert knowledge is required to build process sequences, however, every single process step can be documented in 3D. In order to produce quality models and images, and document each process step, SEMulator3D requires in depth knowledge of the users of the processes. The most advanced CMOS processes being developed today can be reproduced in SEMulator3D’s process editor resulting in detailed 3D models.
Detailed 3D model building
A slight variation on process is the documentation of semiconductor devices and interconnects. For these detailed models, accurate “process-like” descriptions are needed that build the desired geometry. Many process sequences from the real fab can often be combined in a single “model-building-process-step”. The user can either define these in the process editor, or use the traveler import utility to create compressed process libraries from existing detailed process descriptions.
TEM/SEM Cross-Section quality model building
SEMulator3D allows users to build up process stack descriptions based on measured distances, shapes and sizes on SEM and TEM cross sections. This data can than be used to build 3D models of device and interconnect layers. The more accurate information the user has, the more detailed the 3D model will be.
Fast 3D-build checking
When process data is not available, 3D models can still be built by knowing the technology node in which it was built. Very often the combination of design rules, process node and technology file (often available to designers) will give a good first indication on the geometries of the process steps. The “process-stacks” can easily be written, quickly resulting in 3D models. It also allows users to examine process variations by building multiple models with geometrical variations.
The 3D model below was built from just knowing the technology node, a 2D layout of a single 6T-SRAM cell, and a technical drawing of the cross section on paper. Some details near the transistor were left out of the process, but the STI trenches are clearly visible.
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| Cross section view through a 3D model of three 6T-SRAM cells |
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This easy to use process editor gives the user a graphical interface to load existing process files, create/edit complete libraries, change process sequences or individual steps. The Process Editor gives the user complete control to support any semiconductor process. Some of these are pre-defined but those that are restricted can be compressed and password protected.
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| Process entry user interface of SEMulator3D |
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