Semiconductor Process Modeling with SEMulator3D.

SEMulator3D builds 3D models based on your 2D design data and a process description. Our complete suite of Layout, Process and Visualization tools enables SEMulator3D to fit seamlessly into your work environment.

Layout Tools

SEMulator3D contains a full-featured layout editor for viewing and editing layout data, and is fully compatible with layout data in GDSII format from any source. For environments where layout files are large (greater than 1 GB), our GDSII Extraction Tool can extract zones of interest without loading the entire GDSII file in a layout editor, alleviating long load times. SEMulator3D is also capable of connecting directly to Cadence Virtuoso or Magma’s Camelot CAD-NAV software to directly extract layout data for a zone of interest.

For further control and integration with other tools, SEMulator3D contains a powerful mask processing engine based on the Python scripting language. The script-driven interface allows maximum flexibility to integrate SEMulator3D into your software environment.

Process Editor

The SEMulator3D Process Editor is a user-friendly tool for describing your MEMS or Semiconductor process. Similar to a real fabrication process, the SEMulator3D process description consists of a collection of process steps from the Process Step Library. Once created, a process description can be re-used to build 3D models with any layout.

• Fully parametric process description.
• Flexible level of detail, from a simple process stack to a fully detailed process description.
• Process Step Library contains many common MEMS and Semiconductor process steps.
• Get started quickly with an example MEMS or Semiconductor process flow.
• Password protection to secure your proprietary process details.
• Process description is customizable to any process type.
• Custom step names, material names and material colors.
• Extensible via the Python scripting language.

3D Visualization

The SEMulator3D Viewer interactively displays your MEMS or Semiconductor device in 3D. Walk through your process step by step in 3D to understand in detail how the device is made.

• Hide or show materials.
• Make materials transparent to see inside the device.
• Cross-section the device.
• De-process by stripping away layers of material.
• View electrical and mechanical connectivity.
• Make animations of the process flow, cross-section animations and fly-through animations.
• Make custom exploded views.
• Exaggerate the Z-scale to easily view thin layers.
• Export screen shots and animations to many common formats.
• Automatically export your process flow to Microsoft PowerPoint.
• Export to Adobe Acrobat and create interactive 3D PDF files.