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> Home » Solutions » MEMS Process Development

MEMS Process Development


Silicon-Germanium MEMS Accelerometer

Digital Light Processing (DLP) mirror

 


Pop-up gear-driven mirror

Integrated Resonator

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  • MEMS PROCESS DEVELOPMENT

    • Silicon-Germanium MEMS Accelerometer
    • Digital Light Processing (DLP) Mirror
    • MEMS Pop-Up Gear-driven Mirror
    • MEMS Resonator

  • LATEST NEWS

    • Coventor provides a chapter for latest book on MEMS design: System-level Modeling of MEMS.
    • Virtual Fabrication Allows Process Development to Keep Pace
    • Coventor Ships Latest Version of MEMS+IC Co-Design Platform to Accelerate Development of Complex 3D Electronics Systems
    • Ten Technologies that will change the world in 2013
    • Degenerates: A Look at Coventor’s Element Library
    • Breaking The Law One MEMS at a Time

  • UPCOMING EVENTS

    • NMC 2013 – The 10th International Workshop on Nanomechanical Sensing – Stanford, California May 1-3, 2013
    • EDA Workshop 13 and CATRENE DTC – May 14-16, 2013
    • DAC 2013 Austin: Celebrating 50 years of Innovation AUSTIN, TX | JUNE 2-6
    • INTERNATIONAL MEMS FORUM 2013 – June 25-26, Electropribor, St. Petersburg, Russia
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