lithography modeling

Directed self assembly may offer similar benefits to EUV, process modeling study says

By Luke Collins, Tech Design Forum

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Directed self assembly (DSA) techniques may offer similar advantages in terms of process variation control as EUV lithography, according to a study carried out using 3D behavioral process modeling techniques.

This could reduce fab cycle times, ease process integration and save costs in advanced semiconductor processes, especially for DRAMs, whose regular structures are well-suited to the use of DSA.

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