mems design

MEMS Energy Harvesting Modeling – Holst – IMEC – Coventor

As wireless sensor nodes become smaller, their energy supply is a limiting factor for further miniaturization as integration density is limited by the space requirements of the energy storage system. MEMS based energy harvesters, such as the one shown in this example, are becoming a key enabler for further miniaturization and deployment of energy autonomous sensor nodes. read more…

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A 2D scanning MEMS mirror from ASTRI

A contribution from Wei Ma, H. -Y. Chan, Yick Chuen Chan, Chun Cheong Wong, Francis Chee Shuen Lee from ASTRI in HongKong.

Introduction:
This micro-mechanical scanning mirror has drawn wide attention recently as its combination with diode light sources (e.g., laser diodes) provides a promising solution for mini image projectors, which can be integrated in portable electronics. The combination of a large scanning angle at a high resonant frequency but low actuation power is essential for this application.

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