mems design

Compact Multi-Axis MEMS Vibration Monitor Provides Exceptional Low-Noise Performance and Embedded Analysis

Analog Devices, Inc. (ADI) is continuing to help industrial equipment designers improve system performance and reduce maintenance costs through more efficient vibration detection and isolation with the introduction today of the MEMS-based ADIS16228 iSensor vibration monitor. The fully integrated vibration analysis system features an embedded programmable processor that provides directional sensing and spectral analysis to identify and classify individual sources of vibration. This enables the earliest possible detection, identification, and isolation of vibration sources from equipment and bearing wear that otherwise can lead to operating errors and costly equipment downtime. The noise performance of the ADIS16228 vibration monitor is specified at only 248 µg/ √Hz, across a dynamic range of ±18g, configurable to settings of 0 g to 1 g/5 g/10 g/20 g. By embedding these small vibration monitors, applications ranging from wind turbines to precision factory automation and assembly equipment will benefit from automatic vibration profiling. read more…

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MEMS Energy Harvesting Modeling – Holst – IMEC – Coventor

As wireless sensor nodes become smaller, their energy supply is a limiting factor for further miniaturization as integration density is limited by the space requirements of the energy storage system. MEMS based energy harvesters, such as the one shown in this example, are becoming a key enabler for further miniaturization and deployment of energy autonomous sensor nodes. read more…

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A 2D scanning MEMS mirror from ASTRI

A contribution from Wei Ma, H. -Y. Chan, Yick Chuen Chan, Chun Cheong Wong, Francis Chee Shuen Lee from ASTRI in HongKong.

Introduction:
This micro-mechanical scanning mirror has drawn wide attention recently as its combination with diode light sources (e.g., laser diodes) provides a promising solution for mini image projectors, which can be integrated in portable electronics. The combination of a large scanning angle at a high resonant frequency but low actuation power is essential for this application.

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