mems mirror

A 2D scanning MEMS mirror from ASTRI

A contribution from Wei Ma, H. -Y. Chan, Yick Chuen Chan, Chun Cheong Wong, Francis Chee Shuen Lee from ASTRI in HongKong.

Introduction:
This micro-mechanical scanning mirror has drawn wide attention recently as its combination with diode light sources (e.g., laser diodes) provides a promising solution for mini image projectors, which can be integrated in portable electronics. The combination of a large scanning angle at a high resonant frequency but low actuation power is essential for this application.

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