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SEMulator3D increases your productivity and improves your understanding of the designer’s intent and the fab process
With SEMulator3D software, you will increase your efficiency and success rate by:
- closing the loop with the design community reducing rework, retries and re-dos
- improving tool utilization time with off-line planning
- avoiding missed end points and wasted days of data acquisition
- improving end point prediction in both horizontal and vertical directions
- removing non-FIB work from your tools
- increasing capacity and proficiency on any tool, with any operator at any time
- visualizing region of interest during FA process
- easily understanding where to stop a cross section, TEM prep, Slice and View, or real time Image-While-Mill
- visualizing area during deprocessing
- assisting in the Circuit Edit process
- improve your ability to plan CE work
- move workplanning of Circuit Edit away from the FIB equipment
- start front side edit jobs at a 70% success rate instead of 20%
- visualize electrical connectivity and layer thickness in region of edit
- real time synchronization between model and in progress edit
- remove operator uncertainty during editing process
- archive 3D circuit edits for cross training
Smaller geometries and more complex designs are requiring accurate 3D information to decrease operator guesswork, allow for planning of experiment, and in general, increase operator efficiency and decrease the time-to-result. SEMulator3D software together with analysis capabilities are becoming essential to increasing yield and for conducting routine FA operations. |
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| SEM photograph of chip interconnects (metal lines) where the insulating dielectric has been stripped. |
| Si accurate cross-sectioning 3D model |
| Cross-section of process variance |
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