We have obtained critical, counter-intuitive insights that we wouldn’t have easily discovered if we were using experimental wafer-based testing...SEMulator3D allows us to understand critical flow marginalities and enables us to devise alternative solutions. SEMulator3D is the most “silicon-accurate” process modeling software for these complex process variation studies. It provides high value to imec and our partners, by accelerating and reducing development cycles and limiting the time and cost of wafer-based cycles of learning.

The latest CoventorMP product release delivered a breakthrough in MEMS design capabilities. With the introduction of GDS import capabilities and the ability to mesh arbitrary geometry in MEMS+, we can quickly and accurately evaluate the performance of a MEMS design at both the device and system level. MEMS+ allows us to easily iterate on design changes and improvements to meet our product performance goals. ADI has greatly benefitted from Coventor’s advances in MEMS design automation, and we look forward to continuing our long-term collaboration with Coventor.

Virtual fabrication with SEMulator3D allows engineers to readily develop and test a large number of process step combinations and novel process flows using multiple physical design patterns, which wouldn’t be possible in a real manufacturing environment or would be costly to perform. The model for each process step can be calibrated through experimental measurements, resulting in very reliable result-models that can be reused in multiple combinations.

The Verilog-A Reduced Order Model (ROM) exported from MEMS+ captures second order effects not seen in basic hand-crafted models without any compromise in simulation performance. We were able to create a Verilog-A ROM of a complex gyro design in just a few minutes, allowing our ASIC team to work in parallel with the MEMS team on further design iterations. (….) The robust model exchange between MEMS and ASIC designers enabled by MEMS+ reduces the probability of design error and can help avoid costly redesign iterations needed to address unexpected behavior.

SEMulator3D is our tool of choice for experimenting with new technologies and ideas. We also use SEMulator3D to create 3D cross sections for documentation and training of new colleagues. The ability to generate 3D pictures and animations makes it much easier to explain a process.