February 28, 2023Published by Dempsey Deng at February 28, 2023Categories Coventor BlogA Comparative Evaluation of DRAM bit-line spacer integration schemesIntroduction With decreasing dynamic random-access memory (DRAM) cell sizes, DRAM process development has become increasingly difficult. Bit-line (BL) sensing margins and refresh times have become problematic as cell sizes have […]
