June 26, 2020
Virtually every MEMS and sensor device inside the latest electronic products has been made using Lam Research equipment

Enabling Better MEMS from Concept to High Volume Manufacturing

Lam Research® is one of the top equipment suppliers in the semiconductor ecosystem. As a trusted, collaborative partner to the world’s leading semiconductor companies, Lam Research is a fundamental enabler […]
May 1, 2015
MEMS-CMOS Autonomous Switched Oscillator presented by Guilherme Brondani Torr (© imec) [1]

MEMS System Co-Design at DTIP

The 17th edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2015) took place this year in Montpellier, Southern France, on April 28-30. This […]
December 3, 2013
Smart System components addressed by the SMAC consortium

Toward Smarter Design of Smart Systems

Without MEMS today’s smart phones wouldn’t be called “smart”. Be it motion sensing with accelerometers and gyroscopes, noise cancelling with multiple microphones, multi-band radios with tunable RF MEMS capacitors, MEMS […]
October 27, 2009
(left) SEM image and (right) SEMulator3D image of process steps in the Dalsa MEMS process.

Virtual fabrication is a more productive way to build integrated MEMS/CMOS systems than process simulation.

Dalsa Semiconductor and Coventor have published an article on the use of virtual fabrication for MEMS processing. Virtual fabrication process emulation backed up by experimental calibration is a more productive […]
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