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  • CoventorMP 2.1 is released!
Figure 1: The MEMS-based gravimeter is comprised of a DRIE etched silicon layer which is anodically-bonded to a partially etched glass wafer
Measuring Gravity using Gravimeters and MEMS
May 19, 2022
Figure 4:   Current Density Top-Down View of Virtual-Model Experiment Runs. Each experimental setup (shown in Images A, B and C) have different experimental run treatments (refer to Figure 1 for treatment descriptions). Image A: The rail is not continuous, causing the current to flow through the interior of the wordline. Image B: The memory hole size is the same as in Image A, but the wide rail allows current to flow along the outer edges of the wordline. Image C:  A nominal memory cell hole size is shown.  In this case, the nominal wordline rail distance supports a more uniform current density pattern.
3D NAND Virtual Process Troubleshooting and Investigation with SEMulator3D
July 15, 2022

CoventorMP 2.1 is released!

Published by Martha Lee at June 10, 2022
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  • CoventorMP
  • MEMS
  • MEMS+
MEMS+ model of a 3 axis Gyroscope that illustrates new MEMS+ features. The model is comprised of 4 flexible plates formed from two pairs of mirrored meshes attached to electrodes. These plates are displayed semi-transparently, to highlight the underlying electrodes  (Source:  Chipworks, "Motion sensing in the iPhone 4: MEMS Gyroscope". Y. Loke, STMicroelectronics, Semicon West 2013)

MEMS+ model of a 3 axis Gyroscope that illustrates new MEMS+ features. The model is comprised of 4 flexible plates formed from two pairs of mirrored meshes attached to electrodes. These plates are displayed semi-transparently, to highlight the underlying electrodes  (Source:  Chipworks, "Motion sensing in the iPhone 4: MEMS Gyroscope". Y. Loke, STMicroelectronics, Semicon West 2013)

We are pleased to announce the release of CoventorMP 2.1, which includes MEMS+ 7.1 and CoventorWare 11.1. New features streamline device creation and make simulation results easier to load and view.

Device Creation

These new features help you easily create more accurate models:

Create multi-physics models effortlessly: MEMS+ now automatically connects a planar movable gap to a meshed plate, thereby easily adding electrostatic, contact, and squeezed-film damping models for simulation. This feature offers improved sensor and actuator modeling for all designs.

Automatic hierarchy generation of components upon construction: Add-on components now have an “Automatically Add to 3D Schematic” capability, which streamlines model creation when using either the Construct 3D Model option or during manual model construction. This feature automatically adds child components such as gaps, stacks, stators, and rigid plate segments, when their parent is created in Innovator.

Figure 1   All multi-physics Gap components automatically added at model construction

Figure 1:  All multi-physics Gap components automatically added at model construction

Instantaneous Symmetrical Mesh Creation: Copied, replicated, or moved meshed components will have the same mesh as the original.  These actions will not trigger a remesh of the entire device. This feature will save meshing time and ensure construction of symmetric meshes that will capture orthogonal and spurious modes with increased precision.

MEMS+ model of a 3 axis Gyroscope that illustrates new MEMS+ features. The model is comprised of 4 flexible plates formed from two pairs of mirrored meshes attached to electrodes. These plates are displayed semi-transparently, to highlight the underlying electrodes  (Source:  Chipworks, "Motion sensing in the iPhone 4: MEMS Gyroscope". Y. Loke, STMicroelectronics, Semicon West 2013)

MEMS+ model of a 3 axis Gyroscope that illustrates new MEMS+ features. The model is comprised of 4 flexible plates formed from two pairs of mirrored meshes attached to electrodes. These plates are displayed semi-transparently, to highlight the underlying electrodes  (Source:  Chipworks, “Motion sensing in the iPhone 4: MEMS Gyroscope”. Y. Loke, STMicroelectronics, Semicon West 2013)

Device Simulation

These new features help you simulate more efficiently:

Automatically Reload Result Data: The MEMS+ Simulator msim file now loads simulation results and MROM models that were saved with the file.  GetInfo information and 3-D results are loaded and ready for viewing without rerun an analysis. An MROM model saved with the msim does not have to be regenerated before running any nested simulations.

More efficient noise analysis: The linear solver used in Simulator noise analysis has been updated to a version with faster simulation time; users may see a slight change in results.

 

For more information about this new release, or how to take advantage of these new capabilities, please contact us.

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Martha Lee
Martha Lee
Martha Lee is a Senior Technical Writer at Coventor, where is she has worked for 22 years. She works with developers, application engineers and Quality Assurance to create documentation for the CoventorMP software suite. She has an undergraduate degree from North Carolina State University.

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