Figure 3. Results of etch process applied against base structure (b, middle). The base structure displayed the expected etch results, while the structure with the larger initial opening (c, right) has unexpected topology at the bottom of the structure. The structure with the smaller opening and higher stair shape (a, left) experienced a reduced final etch opening and etch depth (compared to the base structure (b)) at the completion of the modeled etch process.

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