Figure 1: Three SEMulator3D software images and two 3D models are shown in this figure. Figures 1(a)-(c) display images taken from SEMulator3D with line edge roughness modeling options within the software (left, top right and center). Figures 1 (d) and 1 (e)) compare two 3D models. The model on the left (Figure 1d) displays straight lines with no line edge roughness. The 3D model on the right (Figure 1e) displays lines with line edge roughness using a Gaussian noise type setting (rms = 4 nm, Correlation length = 0.8 nm).