See us at booth #2239!
Coventor/Lam will also be will be giving the following talks:
Coventor / Lam is participating!
Coventor is exhibiting! See us at booth #835.
Coventor is exhibiting! See us at table #11.
Lam / Coventor will be giving oral presentations on:
- “Advanced 3D Design Technology Co-Optimization for Manufacturability”
- “Influence of SiGe on Parasitic Parameters in PMOS”
Coventor is exhibiting! See us at booth #323/325. Coventor will be presenting a keynote on:
- “Combining equipment sensors and control hardware with metrology and advanced computational methods for comprehensive 3D process control”
Coventor will also be giving oral presentations on:
- “Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond”
- “Self-aligned quadruple patterning assessment for 16nm half-pitch metal 2 BEOL using virtual fabrication”
- “Backside power delivery as a scaling knob for future systems”