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Self-aligned Fin Cut Last Patterning Scheme for Fin Arrays of 24nm Pitch and Beyond

Published by Sandra Liu at October 2, 2023
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  • Create Date October 2, 2023
  • Last Updated October 2, 2023

Self-aligned Fin Cut Last Patterning Scheme for Fin Arrays of 24nm Pitch and Beyond

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Sandra Liu
Sandra Liu

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