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2020 SPIE Advanced Lithography conference
February 23, 2020 - February 27, 2020
Coventor is exhibiting! See us at booth #323.
We will also be giving an invited talk “Full stack computational optimization through process emulation” on Thursday, February 27 and a poster presentation entitled “Impact of EUV resist thickness on local critical dimension uniformities for <30 nm CD Via patterning” on Wednesday, February 26