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The IEEE Electron Devices Technology and Manufacturing (EDTM) 2021 Conference
March 9, 2021 - March 12, 2021
Coventor will be presenting the following paper at this year’s EDTM conference:
“Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance”
Authors: Qingpeng Wang, Yu De Chen, Rui Bao, Cheng Li, Jacky Huang and Joseph Ervin