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The IEEE Electron Devices Technology and Manufacturing (EDTM) 2021 Conference

March 9 - March 12

Coventor will be presenting the following paper at this year’s EDTM conference:

“Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance”

Authors:  Qingpeng Wang, Yu De Chen, Rui Bao, Cheng Li, Jacky Huang and Joseph Ervin

Details

Start:
March 9
End:
March 12
Event Category:
Website:
https://ewh.ieee.org/conf/edtm/2021/

Venue

The Century City International Convention Centre (CCICC)
198 Century City Road, Hi-Tech District
Chengdu, Sichuan China
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