SPIE Advanced Lithography 2022

Coventor will be presenting 3 papers:  “ZigZag Nanosheets Transistor Introduction: a Path for Forksheet FET Architecture Scalability”, “Impacts of Process Flow, Scaling, and Variability on Interconnect Performance” and “Gaining Insight into Critical Dimension Sensitivity and Uniformity in an SADP Based Advanced DRAM Cut Process using Virtual Fabrication”