Simulink schematic containing MEMS+ model of the Accelerometer, including mechnical-contact and non-linear squeeze film damping. The model is connected to a simple second order sigma-delta controller, comprised of an ideal comparator and a D-type latch. Two anti-phase feedback signals are generated from the output bit-stream using ideal switches and fed back to the control combs on the Accelerometer. The inserted scope plot shows the input acceleration (upper) and feedback control voltage (lower).

Request Demo