MEMS Process Development

MEMS processes are typically highly customized for each device design. The ability to model new process flows, document process decisions, and verify process designs with SEMulator3D offers compelling advantages over the traditional “build-and-test” approach.

Process engineers often know what to expect from a single deposit or etch step and can predict its effect on device geometry. But, when known process steps are combined into novel sequences, the final geometry can be hard to predict. With SEMulator3D, engineers can model new process sequences step-by-step and capture critical information about interactions between process steps, prior to wafer testing.

SEMulator3D can also be used to generate process documentation once a process is complete and ramp-up to production begins. If production goals require transferring fabrication to a new facility or OEM fab, SEMulator3D is a great tool for communicating requirements and expected results.

Click on the images below to see examples of using SEMulator3D for MEMS process development and design verification.