MEMS Process Development

MEMS processes are typically highly customized for each device design. The ability to model new process flows, document process decisions, and verify process designs with SEMulator3D offers compelling advantages over the traditional “build-and-test” approach.

Process engineers often know what to expect from a single deposit or etch step and can predict its effect on device geometry. But, when known process steps are combined into novel sequences, the final geometry can be hard to predict. With SEMulator3D, engineers can model new process sequences step-by-step and capture critical information about interactions between process steps, prior to wafer testing.

SEMulator3D can also be used to generate process documentation once a process is complete and ramp-up to production begins. If production goals require transferring fabrication to a new facility or OEM fab, SEMulator3D is a great tool for communicating requirements and expected results.

Click on the images below to see examples of using SEMulator3D for MEMS process development and design verification.

Silicon-Germanium MEMS Accelerometer


Digital Light Processing (DLP) Mirror


Pop-Up Gear-Driven Mirror


Integrated Resonator


“Virtual fabrication with SEMulator3D “… allows engineers to readily develop and test a large number of process step combinations and novel process flows using multiple physical design patterns, which wouldn’t be possible in a real manufacturing environment or would be costly to perform. The model for each process step can be calibrated through experimental measurements, resulting in very reliable result-models that can be reused in multiple combinations.” – Teledyne DALSA