MEMS Pop-Up Gear-driven Mirror

Download MEMS Pop-Up Gear-driven Mirror SEMulator3D Reader model
Download MEMS Pop-Up Gear-driven Mirror SEMulator3D Reader model
File size 75.9 MB
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Construction of this mirror device application example is based on the Sandia Ultra-planar Multi-level MEMS Technology 5 (SUMMiT VTM) fabrication process. SEM images are courtesy of the Sandia website. Mask design and process information are courtesy of Sandia National Labs.

Figure 1: SEM image of pop-up mirror with part of the gear drive assembly

SUMMiT V fabrication involves a five-layer polycrystalline silicon surface micromachining process using one metal layer (interconnects/ground plane) and four mechanical layers. This mirror device uses all five polysilicon layers. The SEMulator3D Process Editor implemented the fabrication sequence using a standard library1 of process steps. The resulting model was generated in 23 minutes2 on a Windows XP system with Intel Duo Core 2.66 GHZ processor and 3GB RAM.

Figure 2: Animation of the fabrication sequence in SEMulator3D

Figure 3: SEMulator3D cross-section view before release

Figure 4: Gear drive assembly after release

In addition to visualizing step-by-step construction of the MEMS device, SEMulator3D provides the MEMS designer with a unique perspective for predicting defects in geometry. It offers the flexibility to run a 3D design rule check (DRC) on the model geometry, rather than using just standard 2D DRC. Layer thicknesses can be automatically extracted at any location in the model. Volume, surface area, and electrical connectivity data can also be verified after device construction.

Figure 5: SEMulator3D animation of the pop-up mirror device using motion paths. Motion paths are used to program the motion of mechanical components in order to visualize their movements.

SEMulator3D geometry can also be modeled with surface and volume meshes and exported to industry-standard field-solvers. SEMulator3D meshes are suitable for many types of behavioral simulation.

Figure 6: Mesh generated on the gear drive assembly


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