Process-Driven Design Entry

MEMS are built with a wide array of fabrication processes. The fabrication process and masks (2D layout) together define and constrain the device structure. So, it’s natural that MEMS design entry should mimic the actual flow:

CoventorWare builds 3D models from 2D layout and a description of the fabrication process

Our customers tell us that CoventorWare® provides the most intuitive, fastest way to generate 3D models of their MEMS designs. The CoventorWare front end includes:

  • a material properties database, pre-populated with commonly used MEMS materials,
  • a process editor for providing a geometric description of the fabrication process,
  • a full-featured, hierarchical layout editor with MEMS-specific features like support for true curves,
  • a preprocessor for viewing 3D models and preparing them for analysis,
  • 2D and 3D import/export to widely used formats like GDS2, DXF, SAT, IGES and STEP, and
  • optional mesh generation and export to Ansys

CoventorWare’s front-end design-entry capabilities are well integrated with the suite of field solvers, but can also be used as a stand-alone front end to 3rd-party FEA tools such as Ansys.

MEMS microphone model built in CoventorWare, with one quarter cut away

3D MEMS package model built in CoventorWare



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