A*Star Institute of Microelectronics Announces MEMS Consortium Phase II to Pave Way for High Volume Manufacturing

Singapore, 6 June 2012
A*STAR Institute of Microelectronics (IME) has announced the launch of its Micro-Electro-Mechanical-Systems (MEMS) Consortium Phase II, to accelerate MEMS technology into markets driven by strong demand for next generation mobile devices. The second phase of the MEMS Consortium will build on the work accomplished in Phase I to develop 3 product-oriented (PO) devices, namely, the Oscillator, Magnetometer and Energy Harvester, which are among the fastest growing MEMS devices in the next five years.

Phase I has successfully established common MEMS technology platforms for Silicon-On-Insulator (SOI) MEMS, aluminum nitride radio frequency (AIN RF) MEMS and wafer-level packaging (WLP) with solder hermetic bonding. Phase II will focus on establishing MEMS process modules and MEMS-CMOS integration methodologies for the chosen PO devices based on IME’s advanced through-silicon-via (TSV) technology. With the devices as demonstration vehicles, Phase II also aims for developing a process design kit (PDK) for MEMS, paving the way for standardization and cost-effective MEMS solutions for high volume manufacturing.

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