EEJournal
by Bryon Moyer

A number of years ago, Coventor created a program called SEMulator 3D. Its target usage was for developing MEMS processes and devices, MEMS devices traditionally having the unfortunate characteristic that a specific device typically required a specific process. Coventor refers to it as “virtual fabrication” since it can abstract and model the steps used to fabricate a MEMS wafer.

To read more, please go to the full article at EEJournal: http://www.eejournal.com/archives/articles/20121001-coventor/