By Ed Sperling
MEMS devices inspire awe on the design side. On the test and manufacturing side, they evoke a different kind of reaction.
These are, after all, the intersection of mechanical and electrical engineering—a joining of two miniature worlds that are the basis of some of the most complex technology on the planet. But getting these devices to yield sufficiently, understanding what does or does not work, and figuring out how to do this with the kind of economies of scale that have made semiconductors affordable present some monumental challenges in the MEMS world.