CARY, NC– February 8, 2016 – Coventor®, Inc., the leading supplier of virtual fabrication solutions for semiconductor devices and micro-electromechanical systems (MEMS), today announced it will be exhibiting at the SPIE Advanced Lithography Conference in San Jose, CA from February 21 – 25, 2016. Coventor will highlight how its SEMulator3D virtual fabrication environment has been used to help understand and resolve issues in adopting new lithography technologies in its booth (#227) and in a series of technical papers.
Moving to EUV or alternate lithography technology is important for the industry, because it will enable chips to become smaller, faster and more functional. Coventor’s contribution to this effort is in simulating new lithography processes to predict problems and provide insight into the potential implementation of these lithography technologies in high volume semiconductor manufacturing, without the time and expense of actual wafer fabrication. As it continues to get more difficult and more costly to move to smaller nodes, virtual fabrication is becoming a more critical tool for chipmakers.
Coventor and its customers have been using virtual fabrication to deepen the understanding of what’s required to incorporate new lithography technologies. Coventor will present two papers related to this topic at SPIE 2016:
The latest version of Coventor’s SEMulator3D Virtual Fabrication Platform enables process modeling for FinFETs, 3D NAND Flash, BEOL, Nanowires, 3D-IC, FDSOI, DRAM, and other next generation processes. In addition it includes modeling performance enhancements, a new GUI for the process editor and adaptive incremental rebuild capabilities.
Coventor, Inc. is the market leader in automated design solutions for developing semiconductor process technology, as well as micro-electromechanical systems (MEMS). Coventor serves a worldwide customer base of integrated device manufacturers, memory suppliers, fabless design houses, independent foundries, and R&D organizations. Its SEMulator3D modeling and analysis platform is used for fast and accurate ‘virtual fabrication’ of advanced manufacturing processes, allowing engineers to understand manufacturing effects early in the development process and reduce time-consuming and costly silicon learning cycles. Its MEMS design solutions are used to develop MEMS-based products for automotive, aerospace, industrial, defense, and consumer electronics applications, including smart phones, tablets, and gaming systems. The company is headquartered in Cary, North Carolina and has offices in California’s Silicon Valley, Waltham, Massachusetts, and Paris, France. More information is available at https://www.coventor.com.
Coventor and SEMulator3D are registered trademarks of Coventor, Inc. All other trademarks are the property of their respective owners.
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