Long Beach, California
Ryan Patz will deliver a paper on Advanced BEOL/Interconnect Etching, which looks at the use of virtual fabrication in the development of a 22nm process technology. His talk is on Monday October 28, 2013 at4:00 PM. It is based on his white paper which can be downloaded here.
The AVS International Symposium and Exhibition addresses cutting-edge issues associated with materials, processing, and interfaces in both the research and manufacturing communities. The weeklong Symposium fosters a multidisciplinary environment that cuts across traditional boundaries between disciplines, featuring papers from AVS technical divisions, technology groups, and focus topics on emerging technologies. The equipment exhibition is one of the largest in the world and provides an excellent opportunity to view the latest products and services offered by over 200 participating companies. More than 2,000 scientists and engineers gather from around the world to attend.