San Jose Marriott and San Jose Convention Center
San Jose, California, United States
23 – 27 February 2014
Coventor will be in Booth #330
This is the premier conference for the lithography community. For 38 years, SPIE has brought together this community to address challenges presented in fabricating next-generation integrated circuits. Symposium participants come from an extensive array of backgrounds to share and learn about state-of-the-art lithographic tools, resists, metrology, processes, and design and process integration.
Coventor will be in Booth #330 and showcasing our SEMulator3D 2014 virtual fabrication platform that leading IDMs, foundries and memory suppliers are using to dramatically reduce the cost and time involved in process development invoking advanced technologies such as FinFETS and 3D ICs.
learn more: https://spie.org/x10942.xml