CoventorWare is a suite of field solvers integrated with pre- and post-processing tools. The suite has many MEMS-specific features that make it the preferred choice over general-purpose finite element tools for simulating MEMS and other micro-fabricated devices.

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CoventorWare Product Overview

CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. The suite has many MEMS-specific features for modeling and simulating a wide range of MEMS devices, including inertial sensors (accelerometers and gyros), microphonesresonators, and actuators. The software’s field solvers can model a wide range of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects.

Whether exploring design concepts or performing detailed verification of device behavior, CoventorWare users benefit from our extensive MEMS simulation experience and modeling enhancements. CoventorWare is widely recognized within the MEMS industry as the best-in-class solution for multi-physics MEMS simulation, and sets the standard for MEMS simulation accuracy, capacity and speed.

Von Misses stress contour on gyro die-level package (deformation scaled by 2000)
Accelerometer spurious mode
IHP RF Switch deformed by residual stress and applied actuation voltage
Charge density on Humidity Sensor with a comb-shaped top electrode with branches

Learn how CoventorWare can help you model and simulate a wide range of MEMS devices. Go to our MEMS Solution page!

Software Capability Highlights

Detailed device analysis with a suite of FEM/BEM solvers. The 2D-to-3D model builder, automatic meshing and field solvers are optimized for MEMS structures and multi-physics, addressing most types of MEMS.

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Process-Driven Design Entry

Process-Driven Design Entry

CoventorWare has many MEMS-specific features that make it easy to prepare efficient simulation models. 3D models can be built directly from layout or imported from other tools including MEMS+.

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Automatic Meshing

To efficiently mesh the high-aspect-ratio structures typical of MEMS, it is imperative to use hexagonal (hex) elements rather than tetrahedral elements. CoventorWare includes a selection of meshing algorithms for generating hex-dominant meshes that are optimal for MEMS structures.

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Hybrid BEM/FEM Coupled Electromechanics

CoventorWare is widely recognized for accurately simulating electrostatic capacitance and force, along with non-linear, coupled electro-mechanics effects such as pull-in, lift-off and electrostatic spring softening. CoventorWare uses a hybrid finite-element/boundary-element (FEM/BEM) approach that avoids compromises to accuracy and efficiency.

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Damping Mechanisms

Whether simulating the transient response of an accelerometer, or estimating the Q factor of a resonator, modeling damping correctly is crucial. With CoventorWare, it’s possible to simulate energy loss mechanisms and accurately predict damping coefficients.

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Piezo-Resistance (PZR) for PZR Sensors

CoventorWare provides a unique approach for simulating piezo-resistive (PZR) sensors, taking advantage of the dominance of the piezoresistive effect over shape change on sensor output. The stress field is precomputed using CoventorWare’s mechanical solver and mapped onto the geometry of the piezo sensor.

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Electrothermal physics

Electro-Thermo-Mechanical Physics for Actuators and Bolometers

CoventorWare is an ideal environment for designing microbolometers, for which simulating the complete operation of the sensor requires analyzing multiple coupled physical domains, including thermal, mechanical, and electrical domains. It provides a fully coupled thermal-electrical procedure for analyzing this type of problem and employs finite elements that are well suited to modelling the thin films common to this type of device.

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switch model

MEMS Mechanics for Displacement Stress and Dynamic Analysis

During MEMS fabrication, thermal cycling during deposition and etching can generate stress in deposited layers. CoventorWare enables MEMS designers to predict the 3D impact of residual stress by modeling isotropic, anisotropic and stress gradients in complex geometry, including conformal depositions.

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Simulate high-frequencybulk modes in PZE resonators(FBAR, LVR, etc.)

PZE coupled Physics for Acoustic Resonators or Sensing and Actuation

CoventorWare couples piezoelectric and mechanical physics to accurately predict the frequency response of devices such as acoustic resonators, or devices that employ piezo physics for sensing and actuation such as energy harvesters.

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