SEMulator3D^®

Starting from input design data, SEMulator3D follows an integrated process flow description to create the virtual equivalent of the complex 3D structures created in the fab.

Design (GDSII/OASIS)

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Process Flows

Predict 3D Integrated Structure from Design and Process Data

BEOL Interconnect in circle

BEOL Interconnect

CMOS-Devices-In-Circle

3D-NAND-Flash-In-Circle

MEMS-loT-Devices-In-Circle

MEMS/loT Devices

GAA-Emerging-Devices-In-Circle

More Emerging Devices

Fast, Robust, Accurate

SEMulator3D’s process-predictive capabilities benefit all participants in the semiconductor supply chain, from techonology developers to fabless IP providers to equipment and process vendors.

Predictive Process Modeling

Predicts complex interactions between designs and integrated process flows. Identify process problems prior to fabrication.

Perform Variation Experiments

Efficiently develop process flows and perform automated virtual experiments not feasible in the actual fab

Flexible and Robust

Flexible for multiple use cases & applicable to any process and any layout, regardless of complexity or technology.

Valuable at Every Stage

Leverage virtual fabrication at every stage of technology development. Decrease costly, time-consuming silicon learning cycles

Learn how SEMulator3D can help you address the challenges of advanced semiconductor fabrication and reduce cycles of silicon learning. Check out our case studies.

SEMulator3D Use Cases

Software Capability Highlights

SEMulator3D^® is a powerful 3D semiconductor and MEMS process modeling platform that offers wide ranging technology development capabilities. Based on highly efficient physics-driven voxel modeling technology, SEMulator3D has a unique ability to model complete process flows.

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Core Process Modeling

Using unique physics-driven 3D modeling technology, the SEMulator3D modeling engine can model a wide variety of unit process steps. Each process step requires only a few geometric and physical input parameters that are easy to understand and calibrate. Just as in an actual fab, upstream unit process parameters (such as deposition conformality, etch anisotropy, selectivity, etc.) interact with each other and design data in a complex way to impact the final device structure.

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Advanced Process Modeling

To correctly predict the end result of a complete process flow, each process step must be modeled accurately. SEMulator3D Advanced Process Modeling adds additional process steps to the standard library, such as MultiEtch and Selective Epitaxy. These steps provide more accurate modeling of plasma (dry) etching, selective epitaxial growth, and more.

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Automation

SEMulator3D Automation is a spreadsheet-driven automation engine that enables massively parallel process variation studies. By automatically building a series of SEMulator3D models with specific variations in process parameters, SEMulator3D Automation enables virtual studies of process tolerances, yield or cross-wafer uniformity.

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Analytics

The SEMulator3D Analytics module automates statistical analysis of process variation directly within SEMulator3D. The new Analytics user interface guides users in the design, execution and analysis of large statistical experiments using various techniques, including Monte-Carlo process variation. Automated multivariate regression is used to identify important parameters and rank them by their impact on process variation.

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Device Analysis

The Device Analysis feature, as part of the Electrical Analysis module, can extract electrical characteristics of a transistor, and explore transistor process variability on device performance, all directly within SEMulator3D.

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Electrical Analysis

The Electrical Analysis module adds powerful resistance and capacitance extraction to deepen the understanding of process and design sensitivities. The Electrical Analysis module can calculate the resistance of conductor nets and capacitance of nets directly within SEMulator3D, providing a single platform for both 3D modeling and validation of electrical function.

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Visualization

SEMulator3D Viewer shows a 3D rendering of the virtual device model at every step in the process. Step-by-step visualization can aid in understanding process failure modes and other complex process phenomena. Cross-sectioning and dimensional measurements can be performed anywhere on the 3D model. SEMulator3D Viewer has many advanced capabilities, including automatic animation of process steps and automatic export to Microsoft PowerPoint.

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And Much More...

Mesh generation for export to standard mesh formats
A full suite of layout viewing and editing tools
Customization via a full Python scripting API
A library of new process modeling capabilities, written in Python
Example process technology files